Method for producing a semiconductor laser

ABSTRACT

The semiconductor laser of the invention includes: a semiconductor substrate of a first conductivity type; a stripe-shaped multilayer structure, formed on the semiconductor substrate, the stripe-shaped multilayer structure including an active layer; and a current blocking portion formed on the semiconductor substrate on both sides of the stripe-shaped multilayer structure, wherein the current blocking portion has a first current blocking layer of a second conductivity type, and a second current blocking layer of the first conductivity type formed on the first current blocking layer, the first current blocking layer includes a low-concentration region having a relatively low concentration of an impurity of the second conductivity type, and a high-concentration region having an impurity concentration which is higher than that of the low-concentration region, and the low-concentration region is provided at a position closer to the stripe-shaped multilayer structure than the high-concentration region.

This application is a division of application Ser. No. 08/331,939, filedOct. 31, 1994, U.S. Pat. No. 5,568,501.

BACKGROUND OF THE INVENTION

1. Field of the Invention

The present invention relates to a semiconductor laser and a method forproducing the semiconductor laser. More particularly, the presentinvention relates to a semiconductor laser suitable for optical fibercommunication and the like, and a method for producing such asemiconductor laser.

2. Description of the Related Art

In order to improve the production yield of semiconductor lasers, atechnique for growing a current blocking layer in addition to an activelayer on a substrate by MOVPE (metal organic vapor phase epitaxy) hasbeen studied. A semiconductor laser in which all semiconductor layersrequired for the semiconductor laser are grown on an InP singlecrystalline substrate by MOVPE has been reported. See the Journal ofCrystal Growth 93 (1988) 792 A. W. Nelson et al.

Referring to FIG. 18, the conventional semiconductor laser is described.In FIG. 18, on a substrate 50, an InP buffer layer 51, an active layer52, a p-InP first current blocking layer 53, an n-InP second currentblocking layer 54, a p-InP third current blocking layer 55, and acontact layer 56 are formed. On the top face of the substrate 50, ap-side electrode 57 is formed. On the back face of the substrate 50, ann-side electrode 58 is formed. In this semiconductor laser, a currentinjected from the p-side electrode 58 is confined by the second currentblocking layer 54 and then injected into the active layer 52.

In order to enhance the performance of semiconductor lasers, the studyand development of semiconductor lasers having a single quantum well(SQW) structure and a multiquantum well (MQW) structure are activelypursued. The semiconductor laser having a quantum well type active layercan attain superior effects due to the quantum size effect of the activelayer, as compared with a semiconductor laser having a bulk type activelayer. For example, due to an increase of the differential coefficient,a reduction of TM light-emission, and the like, the semiconductor laseroscillates at a low threshold level, so that a large light output can beobtained with high efficiency. In addition, due to an increase of theattenuation oscillating frequency and a reduction of the amplitudeincreasing coefficient, the response speed is increased and the chirpingis reduced.

In order to further increase the differential coefficient, a "gradeddoped structure" is proposed. In the graded doped structure, p-typeimpurities are doped in a part of the barrier layer. Especially when astrained quantum well type active layer has the graded doped structure,the performance of the semiconductor laser is expected to be improved.

FIG. 19 shows a semiconductor laser provided with a quantum well typeactive layer having the conventional graded doped structure (K. Uomi, T.Mishima, N. Chinione, Jpn. J. Appl. Phys., 51(1990)88). In thesemiconductor laser shown in FIG. 19, on a GaAs substrate 61, an n-typeGaAs buffer layer 62, an n-type InAlAs cladding layer 63, a graded dopedquantum well layer 68 which is sandwiched between non-doped GRIN-GaAlAslayers 64, a p-type GaAlAs cladding layer 69, an n-type GaAs currentblocking layer 70, an oxide film 71, and a p-side electrode 73 aresuccessively deposited in this order. The oxide film 71 is provided witha stripe-shaped opening. The p-side electrode 73 is in contact with apart of the n-type GaAs current blocking layer 70 through the opening.At the contact portion, a Zn diffused region 72 extending to the p-typeGaAlAs cladding layer 69 is provided. On the back side of the substrate61, an n-side electrode 74 is provided.

In the above-described conventional semiconductor laser (FIG. 18), it isconfirmed by a long-term high-temperature and acceleration test (FIG.20) that the driving current required for obtaining a predeterminedlight output level is not varied but stable. However, in an initialstage of the test, an increase of driving current caused by the increaseof the threshold level of laser oscillation is observed. When asemiconductor laser is intended for practical use, the increase of thedriving current must be avoided even in the initial stage.

In the case where a current blocking layer is formed by LPE (liquidphase epitaxy), a method for suppressing the increase of the thresholdlevel is established. On the other hand, in the case of the MOVPE, therestill exists the problem that the threshold current is increased.

In addition, the conventional semiconductor laser having a quantum welltype active layer with a graded doped structure (FIG. 19) involves aproblem in that the performance thereof is not so much improved, ascompared with the case without the graded doped structure. This isbecause in the crystal growth after the step of forming the graded dopedstructure, the dopant is disadvantageously diffused from thesemiconductor layer which is grown thereon to the active layer. Thus,the graded doped structure disappears.

SUMMARY OF THE INVENTION

The semiconductor laser of this invention includes: a semiconductorsubstrate of a first conductivity type; a stripe-shaped multilayerstructure, formed on the semiconductor substrate, the stripe-shapedmultilayer structure including an active layer; and a current blockingportion formed on the semiconductor substrate on both sides of thestripe-shaped multilayer structure, wherein the current blocking portionhas a first current blocking layer of a second conductivity type, and asecond current blocking layer of the first conductivity type formed onthe first current blocking layer, the first current blocking layerincludes a low-concentration region having a relatively lowconcentration of an impurity of the second conductivity type, and ahigh-concentration region having an impurity concentration which ishigher than that of the low-concentration region, and thelow-concentration region is provided at a position closer to thestripe-shaped multilayer structure than the high-concentration region.

In one embodiment of the invention, the first and the second currentblocking layers are deposited by organic metal vapor phase epitaxy.

In another embodiment of the invention, the low-concentration region ofthe first current blocking layer has a thickness which becomes thinnertoward the stripe-shaped multilayer structure.

In another embodiment of the invention, the impurity concentration ofthe high-concentration region of the first current blocking layer is2×10¹⁸ cm⁻³ or less, and a concentration of an impurity of the firstconductivity type of the second current blocking layer is 1×10¹⁸ cm⁻³ ormore.

In another embodiment of the invention, a side face of the stripe-shapedmultilayer structure is a crystal plane including a {111}P plane.

In another embodiment of the invention, the semiconductor laser furtherincludes an undoped semiconductor layer provided between the currentblocking portion and a surface of the semiconductor substrate and theside face of the stripe-shaped multilayer structure.

In another embodiment of the invention, the active layer has amultiquantum well structure.

In another embodiment of the invention, the semiconductor laser furtherincludes a semiconductor layer of the second conductivity type whichcovers both the stripe-shaped multilayer structure and the currentblocking portion, the semiconductor layer having a bandgap differentfrom that of the current blocking portion.

According to another aspect of the invention, the semiconductor laserincludes: a semiconductor substrate of a first conductivity type; astripe-shaped multilayer structure, formed on the semiconductorsubstrate, the stripe-shaped multilayer structure including an activelayer; and a current blocking portion formed on the semiconductorsubstrate on both sides of the stripe-shaped multilayer structure,wherein the current blocking portion has a first current blocking layerof a second conductivity type, and a second current blocking layer ofthe first conductivity type formed on the first current blocking layer,and one of two end portions of the second current blocking layer whichis closer to the stripe-shaped multilayer structure has an apex angle of60 degrees or more.

In one embodiment of the invention, a concentration of an impurity ofthe second conductivity type of the first current blocking layer is1×10¹⁸ cm⁻³ or less, and a concentration of an impurity of the firstconductivity type of the second current blocking layer is 1×10¹⁸ cm⁻³ ormore.

In another embodiment of the invention, a side face of the stripe-shapedmultilayer structure is a crystal plane including a {111} In plane.

In another embodiment of the invention, the semiconductor laser furtherincludes an undoped semiconductor layer provided between the currentblocking portion and a surface of the semiconductor substrate and theside face of the stripe-shaped multilayer structure.

In another embodiment of the invention, one of two end portions of thesecond current blocking layer which is closer to the stripe-shapedmultilayer structure has an apex angle of 80 degrees or more.

In another embodiment of the invention, the active layer has amultiquantum well structure.

In another embodiment of the invention, the semiconductor laser furtherincludes a semiconductor layer of the second conductivity type whichcovers both the stripe-shaped multilayer structure and the currentblocking portion, the semiconductor layer having a bandgap differentfrom that of the current blocking portion.

According to another aspect of the invention, a method for producing asemiconductor laser comprising: a semiconductor substrate of a firstconductivity type; a stripe-shaped multilayer structure, formed on thesemiconductor substrate, the stripe-shaped multilayer structureincluding an active layer; and a current blocking portion formed on thesemiconductor substrate on both sides of the stripe-shaped multilayerstructure is provided. The method includes the steps of: depositing aplurality of semiconductor layers including the active layer on thesemiconductor substrate; forming, on the semiconductor layers, a caplayer having an etching characteristic different from an etchingcharacteristic of the semiconductor layers; forming a stripe-shaped masklayer on the cap layer; selectively etching the cap layer and thesemiconductor layer using an etchant to form the stripe-shapedmultilayer structure having a width narrower than that of the cap layer,the etchant substantially not etching the mask layer, but preferentiallyetching the cap layer to the semiconductor layer; and forming thecurrent blocking portion.

In one embodiment of the invention, a width of the stripe-shaped masklayer is twice or more as large as the width of the stripe-shapedmultilayer structure.

In another embodiment of the invention, in the etching step, a part ofthe etchant is entered between the stripe-shaped mask layer and the caplayer.

In another embodiment of the invention, the step of forming the caplayer includes a step of forming the cap layer from InGaAsP crystal, andthe etching step includes a first etching step using an acetic acid typeetchant and a second etching step using a chloric acid type etchant.

In another embodiment of the invention, the step of forming the currentblocking portion includes a step of epitaxially growing the currentblocking portion at a growth temperature of 600° C. or more by organicmetal vapor phase epitaxy.

In another embodiment of the invention, the step of forming the currentblocking portion includes a step of heating said semiconductor substrateto the growth temperature in an atmosphere including an element of groupV of the active layer.

According to another aspect of the invention, a method for producing asemiconductor laser comprising: a semiconductor substrate of a firstconductivity type; a stripe-shaped multilayer structure, formed on thesemiconductor substrate, the stripe-shaped multilayer structureincluding an active layer; and a current blocking portion formed on thesemiconductor substrate on both sides of the stripe-shaped multilayerstructure is provided. The method includes the steps of: depositing aplurality of semiconductor layers including the active layer on thesemiconductor substrate; forming a stripe-shaped mask layer on thesemiconductor substrate; selectively etching the semiconductor layerusing an etchant to form the stripe-shaped multilayer structure, theetchant substantially not etching the mask layer; growing a firstcurrent blocking layer of a second conductivity type on thesemiconductor substrate; and growing a second current blocking layer ofthe first conductivity type on the first current blocking layer, one ofend portions of the second current blocking layer closer to thestripe-shaped multilayer structure having an apex angle of 60 degrees ormore.

In another embodiment of the invention, the first and the second currentblocking layers are epitaxially grown at a growth temperature of 600° C.or more by organic metal vapor phase epitaxy.

In another embodiment of the invention, the production method furtherincludes a step of epitaxially growing an undoped semiconductor layer,prior to the formation of the first and second current blocking layer.

According to another aspect of the invention, a semiconductor laserincludes: a semiconductor substrate of a first conductivity type; astripe-shaped multilayer structure including a quantum well type activelayer having a graded doped structure formed on the semiconductorsubstrate; a current blocking portion formed on both sides of thestripe-shaped multilayer structure, for confining a current in thestripe-shaped multilayer structure; and a semiconductor layer of asecond conductivity type formed above the stripe-shaped multilayerstructure and the current blocking portion, wherein the semiconductorlaser further includes a diffusion suppressing layer covering both thestripe-shaped multilayer structure and the current blocking portion forsuppressing an impurity included in the semiconductor layer of thesecond conductivity type from diffusing into the active layer, thediffusion suppressing layer having a bandgap which is smaller than thatof the current blocking portion.

In one embodiment of the invention, the diffusion suppressing layer hasa solid solubility larger than that of the semiconductor layer of thesecond conductivity type with respect to the impurity doped in thesemiconductor layer of the second conductivity type.

In another embodiment of the invention, the current blocking portion isformed of InP, the semiconductor layer of the second conductivity typeis formed of Zn-doped InP, and the diffusion suppressing layer is formedof InGaAsP.

In another embodiment of the invention, the stripe-shaped multilayerstructure includes a waveguide layer having a solid solubility largerthan that of the semiconductor layer of the second conductivity typewith respect to the impurity doped in the semiconductor layer of thesecond conductivity type, the waveguide layer being provided between theactive layer and the diffusion suppressing layer.

According to another aspect of the invention, a method for producing asemiconductor laser includes the steps of: growing, on a semiconductorsubstrate of a first conductivity type, a multilayer structure includinga quantum well type active layer having a graded doped structure;etching the multilayer structure to form a stripe-shaped multilayerstructure; growing a current blocking portion on both sides of thestripe-shaped multilayer structure for confining a current in thestripe-shaped multilayer structure; forming a diffusion suppressinglayer on the stripe-shaped multilayer structure and the current blockingportion, the diffusion suppressing layer having a bandgap smaller thanthat of the current blocking portion; and growing a semiconductor layerof a second conductivity type on the diffusion suppressing layer.

Thus, the invention described herein makes possible the advantages of(1) providing a semiconductor laser with high reliability in whichcurrent leakage is reduced, and a method for producing the semiconductorlaser, and (2) providing a semiconductor laser in which current leakageis reduced and the graded doped structure is prevented from disappearingduring the production process, and a method for producing thesemiconductor laser.

These and other advantages of the present invention will become apparentto those skilled in the art upon reading and understanding the followingdetailed description with reference to the accompanying figures.

BRIEF DESCRIPTION OF THE DRAWINGS

FIG. 1A is a cross-sectional view of a semiconductor laser according tothe invention, and FIG. 1B is an energy diagram showing an active layerof the semiconductor laser.

FIG. 2A is a cross-sectional view showing the main portions of thesemiconductor laser shown in FIG. 1A, and FIG. 2B is a cross-sectionalview showing the main portions of another semiconductor laser accordingto the invention.

FIGS. 3A to 3C are cross-sectional views showing process steps of amethod for producing the semiconductor laser shown in FIG. 1A.

FIG. 4 is a graph for illustrating the process prior to the step ofgrowing a current blocking layer.

FIG. 5 is a graph showing the relationship between a carrierconcentration of the current blocking layer and a thyristor operation inthe semiconductor laser shown in FIG. 1A.

FIG. 6A is a cross-sectional view of a semiconductor laser according tothe invention, and FIG. 6B is an energy diagram showing an active layerof the semiconductor laser.

FIGS. 7A through 7D are diagrams schematically showing relationshipsbetween a shape of a current blocking layer in the vicinity of theactive layer and a leakage current.

FIG. 8 is a diagram showing a relationship between a Zn concentration ofa first current blocking layer and a variation of a threshold current.

FIG. 9 is a diagram showing a thyristor current, a Zn concentration of afirst current blocking layer, and an Si concentration dependence of asecond current blocking layer.

FIG. 10 is a graph showing the relationship between a carrierconcentration of a current blocking layer and a thyristor operation ofthe semiconductor laser shown in FIG. 6A.

FIG. 11 is a graph showing the relationship between a Zn concentrationand a hole concentration.

FIGS. 12A through 12C are cross-sectional views showing process steps ofa method for producing the semiconductor laser shown in FIG. 6A.

FIG. 13 is a cross-sectional view showing the growth of a currentblocking layer of the semiconductor laser shown in FIG. 1A.

FIG. 14 is a cross-sectional view showing the growth of a currentblocking layer of the semiconductor laser shown in FIG. 6A.

FIG. 15A is a cross-sectional view showing still another semiconductorlaser according to the invention.

FIG. 15B is an enlarged cross-sectional view of a portion of the FIG.15A embodiment of the present invention.

FIG. 16A is a band diagram along current path A, FIG. 16B is a banddiagram along current path B, FIG. 16C is a band diagram along currentpath C, and FIG. 16D is a schematic cross-sectional view correspondingto the cross section shown in FIG. 1A.

FIGS. 17A through 17D are cross-sectional views showing process steps ofa method for producing the semiconductor laser shown in FIG. 1A.

FIG. 18 is a cross-sectional view showing a conventional semiconductorlaser.

FIG. 19 is a cross-sectional showing another conventional semiconductorlaser.

FIG. 20 is a graph showing the result of a long-term high-temperatureand acceleration test for a conventional semiconductor laser.

DESCRIPTION OF THE PREFERRED EMBODIMENTS (EXAMPLE 1)

Hereinafter, a first example of a semiconductor laser according to theinvention will be described with reference to FIGS. 1A and 1B.

First, referring to FIG. 1A, the semiconductor laser in this exampleuses an Sn-doped n-InP substrate 1 having a top face on which astripe-shaped ridge is formed. On the ridge of the n-InP substrate 1, astripe-shaped multilayer structure is formed. On the n-InP substrate 1on both sides of the stripe-shaped multilayer structure, a currentblocking portion provided with a stripe-shaped groove is formed. Thegroove reduces the parasitic capacitance and improves the high-frequencycharacteristics of the semiconductor laser.

The stripe-shaped multi-layer structure includes an n-InGaAsP waveguidelayer 2 having a thickness of 150 nm, an active layer 20, and ann-InGaAsP cladding layer (waveguide layer) 13 in this order from thesubstrate 1. As shown in FIG. 1B, the active layer 20 has a multiquantumwell structure including InGaAsP well layers 3 each having a thicknessof 4 nm and InGaAsP (λg=1.15 μm) barrier layers 4 each having athickness of 10 nm. The number of quantum well layers is 7, and thecavity length is 300 μm.

The current blocking portion includes a Zn-doped p-InP first currentblocking layer (thickness: about 1 μm) 6, and an Si-doped n-InP secondcurrent blocking layer (thickness: about 1 μm) 7 in this order from thesubstrate 1. Between the p-InP first current blocking layer 6 and thesubstrate 1, an undoped InP layer 5 having a thickness of 10 nm isinterposed. On the n-InP second current blocking layer 7, a Zn-dopedp-InP third current blocking layer (thickness: about 4 μm) 8 is formed.The p-InP third current blocking layer 8 also covers the upper face ofthe stripe-shaped multi-layer structure. The relatively thick p-InPthird current blocking layer 8 may alternatively have a two-layerstructure. More preferably, the p-InP third current blocking layer 8 maybe formed by a lower layer having a relatively low Zn concentration(e.g., the Zn concentration is equal to or lower than 1×10¹⁸ cm⁻³) andan upper layer having a relatively high Zn concentration (e.g., the Znconcentration is equal to or higher than 1×10¹⁸ cm⁻³).

On the p-InP third current blocking layer 8, a p-InGaAsP barrierreducing layer 9 for suppressing the Schottky barrier, a p-GaInAscontact layer 10 for forming an ohmic contact, and a p-side electrode 12made of Au/Zn are formed. On the back face of the substrate 1, an n-sideelectrode 11 made of Au/Sn is formed.

FIG. 2A shows the shape of the n-InP second current blocking layers 6and 7 and the shape of the stripe-shaped multilayer structure of thesemiconductor laser in this example in more detail. The side face of thestripe-shaped multi-layer structure is a {111}P plane which is stableand on which the crystal growth is easily performed as compared with a{111}In plane. As described later, in order to form the stripe-shapedmulti-layer structure having the {111}P plane as the side face thereof,for example, InGaAsP crystal is used as the material for the cap layer(represented by "14" in FIG. 3A) and etching is performed by usingacetic acid type etchant. Thereafter, etching is performed again byusing hydrochloric acid type etchant, so as to adjust the stripe height.The side face of the stripe-shaped multi-layer structure may be a{111}In plane. Especially, if any damage occurring on the side face ofthe active layer is suppressed by lowering the Zn concentration of thep-InP first current blocking layer or the like, good characteristics canbe obtained, even in the case of the {111}In plane.

The thickness of the p-InP first current blocking layer 6 is madethinner in the vicinity of the stripe-shaped multi-layer structure. Theupper face of the thinner portion of the p-InP first current blockinglayer 6 is a (114) plane. The p-InP first current blocking layer 6includes a low-concentration region with a relatively low concentrationof Zn which is an impurity of p-type conductivity, and ahigh-concentration region with a Zn concentration higher than that ofthe low-concentration region. The low-concentration region is disposedat a position closer to the stripe-shaped multi-layer structure than thehigh-concentration region (i.e., in the thinner portion). In otherwords, the Zn concentration of the p-InP first current blocking layer 6is relatively lower in the vicinity of the active layer 20 (in a regionaway from the active layer 20 only by several micrometers). When thep-InP first current blocking layer 6 is grown by a conventional crystalgrowth method, the Zn concentration in the vicinity of the active layer20 (in the region away from the active layer 20 only by severalmicrometers) is rather higher than that of the flat portion. In otherwords, the p-InP first current blocking layer 6 having the Znconcentration distribution of this example cannot be obtained by aconventional production method.

The lower Zn concentration reduces the influence of Zn on the activelayer 20. Herein, the phrase "the influence of Zn on the active layer"indicates a phenomenon in that Zn forms a defect as a non-emittingcenter in the active layer or at the interface between the active layerand the first current blocking layer. The reduction of the influence ofZn on the active layer can increase the light output and reduce thethreshold current level, and can also provide high reliability. In thecase where the active layer has the graded doped structure, thediffusion of Zn may destroy the graded doped structure, which isincluded in "the influence of Zn on the active layer". This influencewill be described later in a third example.

In this example, the Zn concentration is relatively lowered in thevicinity of the active layer 20, but the Zn concentration of the flatportion (the high-concentration region) away from the active layer 20 isrelatively high. In this way, when the Zn concentration of the flatportion (the high-concentration region) away from the active layer 20 ismade higher than usual, the influence of Zn on the active layer can bereduced. By increasing the Zn concentration of the flat portion (thehigh-concentration region) of the p-InP first current blocking layer 6,the thyristor current can be increased, and it is possible to realize asemiconductor laser with high output level.

The n-InP second current blocking layer 7 positioned over the p-InPfirst current blocking layer 6 has a substantially flat upper surface.In order to suppress the leakage current, the n-InP second currentblocking layer 7 preferably has a large thickness. However, the n-InPsecond current blocking layer 7 in this example is made thinner in thevicinity of the stripe-shaped multilayer structure, and the angle at theend thereof is acute (e.g., 40 degrees).

Hereinafter, the operation of the semiconductor laser will be describedwith reference to FIG. 1A.

In order to attain the laser oscillation, it is necessary tosufficiently invert the carrier distribution in the active layer 20 bycausing a driving current at a predetermined value (the threshold value)or more to flow between the p-side electrode 12 and the n-side electrode11. In order to obtain a high light output level at a low thresholdvalue, the current flowing between the p-side electrode 12 and then-side electrode 11 is confined in the stripe-shaped multilayerstructure by the current blocking portion in this example.

As the result of the evaluation of the semiconductor laser of thisexample, it is found that the semiconductor laser shown in FIG. 1Astably performs the laser oscillation at a driving current of 20 mA (theoscillation threshold value: 20 mA). The oscillation threshold value issubstantially equal to the oscillation threshold value of asemiconductor laser in which the burying layer is grown by LPE. Also, asthe result of the evaluation on the reliability by an acceleration test(70° C., 150 mA, 100 hr), it is found that the variation of thethreshold value is substantially 0%.

These evaluated results shows that the diffusion of Zn into the activelayer is suppressed in the semiconductor laser of this example. Thediffusion of Zn into the active layer is suppressed because the Znconcentration of the p-InP first current blocking layer 6 is relativelylow in the vicinity of the active layer 20. If the Zn concentration ofthe entire p-InP first current blocking layer 6 is lowered in order tosuppress the diffusion of Zn into the active layer, a thyristoroperation is caused by the p-InP first current blocking layer 6, then-InP second current blocking layer 7, and the p-InP third currentblocking layer 8 during the operation of the semiconductor laser, sothat the output level of the laser light is disadvantageously lowered.

FIG. 5 shows the relationships between the dopant concentrations of thep-InP first current blocking layer 6 and the p-InP second currentblocking layer 7 and the occurrence of the thyristor operation in thesemiconductor laser shown in FIG. 1A. In FIG. 5, region a indicates aregion with high reliability. Region c indicates a region in which thethyristor operation is not caused. Region d indicates a region in whichthe thyristor operation may be caused. The respective concentrations ofthe p-InP first current blocking layer 6 and the p-InP second currentblocking layer 7 are preferably set in the region c. In this example,since the Zn concentration is lowered in the vicinity of the activelayer 20, high reliability can be attained in the wide range shown inthe figure. This is a different feature from the example which isdescribed later (see FIG. 10).

Next, referring to FIGS. 3A to 3C, the method for producing thesemiconductor laser shown in FIG. 1A will be described.

First, on an Sn-doped InP substrate 1, an n-InGaAsP (λg=1.15 μm)waveguide layer 2 is grown to have a thickness of 150 nm by MOVPE. Then,a Ga₀.1 In₀.9 As₀.5 P₀.5 well layer 3 having a thickness of 4 nm, and aGaInAsP (λg=1.37 μm) barrier layer 4 having a thickness of 10 nm arepaired, and the pair of well layer 3 and barrier layer 4 is repeatedlygrown seven times. Thus, a multilayer well type active layer having 7pairs is obtained. Thereafter, a p-InP cladding layer 13 having athickness of 400 nm and a p-InGaAsP (λg=1.3 μm) cap layer 14 having athickness of 100 nm are grown. The p-InP cladding layer 13 and thep-InGaAsP cap layer 14 have different etching characteristics from eachother for at least one type of etchant.

Next, after a silicon nitride film (thickness: 50 to 300 nm) isdeposited on the p-InGaAsP cap layer 14, the silicon nitride film isetched into a stripe shape by dry etching, so as to obtain astripe-shaped silicon nitride film (width: about 3 to 6 μm) 15.Thereafter, the wafer from the p-InGaAsP cap layer 14 to the substrate 1is etched by using an etchant which substantially does not etch thestripe-shaped silicon nitride film 15 but preferentially etches thep-InGaAsP cap layer 14. As for such an etchant, an acetic acid typeetchant is used.

The adhesion between the p-InGaAsP cap layer 14 and the stripe-shapedsilicon nitride film 15 is left to be relatively poor, the etchingpromptly progresses in a horizontal direction, and the semiconductorlayer positioned directly under the stripe-shaped silicon nitride layer15 is also etched. As a result, as shown in FIG. 3B, the stripe-shapedsilicon nitride film 15 is overhung. Then, a predetermined region of theupper face of the substrate 1 is etched by a chloric acid type etchant.The total height of a stripe for adjusting the height of thestripe-shaped ridge formed on the upper face of the substrate 1 is setto be approximately 2 μm. The etching conditions are determined so thatthe width of the stripe-shaped ridge is in the range of 1 to 1.5 μm.

Next, by MOVPE, an undoped InP layer 5 and a p-InP first currentblocking layer 6 and an n-InP second current blocking layer 7 aresuccessively epitaxially grown. Then, the stripe-shaped silicon nitridefilm 15 and the cap layer 14 are removed, and a p-InP third currentblocking layer 8, a p-GaInAsP barrier reducing layer 9 and a p-GaInAscontact layer 10 are grown by MOVPE. Thereafter, an n-side electrode 11and a p-side electrode 12 are vapor deposited, so as to obtain thestructure shown in FIG. 3C.

FIG. 13 is a cross-sectional view which schematically shows the growthof the p-InP first current blocking layer 6, the n-InP second currentblocking layer 7, and the p-InP third current blocking layer 8. In thisexample, the side face of the ridge provided on the substrate isconstituted by a plane including a {111}P plane. The side face of theridge and the upper face of the substrate, i.e., a (001) plane form anangle which exceeds 90 degrees. In the vicinity of the ridge, a face onwhich the p-InP first current blocking layer is grown is constituted bya plane from a (112) plane to a (114) plane. When the growth face is the(114) plane, dangling bonds are not likely to be formed in the grownlayer, and hence less impurities are taken therein, as compared with thecase where the growth face is a {111} plane.

Hereinafter, referring to FIG. 4, the formation step of the p-InP firstcurrent blocking layer 6 and the like is described in detail. FIG. 4 isa graph showing the growth conditions of the p-InP first currentcladding layer 6. The vertical axis of the graph indicates thetemperature (Celsius scale) of a heater for heating the substrate 1 inan MOVPE apparatus, and the horizontal axis indicates the time (minutes)measured from the start of the heating by the heater. In the exampleshown in FIG. 4, after about 5 minutes from the start of the heating,the heater temperature reaches 600° C. Thereafter, the heatertemperature is maintained at 600° C. The actual temperature of thesubstrate 1 does not reach 600° C. after 5 minutes from the start of theheating. The actual temperature of the substrate 1 becomes steady afterabout several minutes from the time when the heater temperature becomessteady.

In this example, during the temperature rise for 5 minutes, thesubstrate 1 is exposed to a mixed atmosphere of PH₃ and AsH₃ in thechamber of the MOVPE apparatus. When 5 minutes elapse from the start ofthe heating, the growth of the undoped InP layer 5 is immediatelystarted. Then, the P-InP layer 6 is grown. In general, there is a riskthat the following problem occurs when the p-InP layer 6 is successivelyformed after the growth of the undoped InP layer 5 in this example. Thatis, during the growth of the undoped InP layer 5, the temperature of thesubstrate 1 has not yet sufficiently risen. Accordingly, the growth ofthe p-InP layer 6 is started while the growth of the undoped InP layer 5is not complete. If the growth of the undoped InP layer 5 is notcomplete, the side face of the active layer is not sufficiently coveredwith the undoped InP layer 5. In such a case, if the dopant (Zn) iscontained in the p-InP layer 6 with a high concentration, the excessivedopant passes through the undoped InP layer 5 and reaches the activelayer. This causes damages in the side face of the active layer. In theportion of the p-InP first current blocking layer 6 in,the vicinity ofthe active layer 20 in this example, the Zn concentration is relativelylow, so that there is little fear that the excessive dopant passesthrough the undoped InP layer 5 and reaches the active layer. In thisexample, it is possible to grow the p-InP layer 6 immediately after thegrowth of the undoped InP layer 5, so that the time required for thegrowth step can be shortened.

As described above, in the case where the atmosphere gas flow rateduring the temperature rises before the InP growth is made similar tothat of the group V element during the growth of the active layer, theelimination of the group V element from the active layer 20 issuppressed. In addition, in the case where the undoped layer is formedbefore the growth of the first current blocking layer, the dopant in thefirst current blocking layer can be prevented from condensing at theinterface with the active layer 20.

In general, the group III element and dopant reaching the siliconnitride film 15 during the crystal growth are diffused on the siliconnitride film 15 in the horizontal direction, and contribute to thecrystal growth around the silicon nitride film 15. Therefore, thecrystal growth rate of the p-InP layer 6 is usually increased in thevicinity of the side face of the stripe-shaped ridge, and the dopantconcentration is increased. However, in this example, the overhungsilicon nitride film 15 suppresses the supply of the group III elementand dopant to the side face of the stripe-shaped ridge due to the maskfunction thereof. As a result, the portion of the p-InP layer 6 belowthe overhung silicon nitride layer 15 is relatively thin, and has alower dopant concentration. In the p-InP layer 6, the reduction of thethickness and the lowering of the dopant concentration are moreremarkable toward the side face of the stripe-shaped ridge below theoverhung silicon nitride film 15. Therefore, even if the dopantconcentration of the flat portion of the p-InP layer 6 is made higher inorder to suppress the thyristor current, the dopant concentration islowered in the vicinity of the active layer, and the limit of solidsolubility cannot be exceeded. Therefore, it is possible to make thedopant concentration of the flat portion sufficiently high.

As shown in FIG. 4, the crystal growth of the p-InP layer 6 is performedat 600° C. At temperatures lower than 600° C., the crystal around themask of the n-InP layer 7 may be abnormally grown. If the growthtemperature is 560° C. or less, the selectivity of the growth(orientation dependence) may be deteriorated. In addition, if the growthtemperature is 560° C. or less, the dependence of the Zn concentrationon temperature is increased, so that the dopant concentration in thegrown semiconductor layer is not stable. Therefore, it is preferred thatthe growth temperature is set to be 600° C. or more.

The respective flow rates of PH₃ and AsH₃ are set to be equal to thosein the case where the waveguide layer 2 is grown. In another case whereonly PH₃ is supplied and the undoped InP layer is not inserted, thethreshold current is increased so as to be double.

(EXAMPLE 2)

Hereinafter, referring to FIGS. 6A and 6B, another example of asemiconductor laser according to the invention will be described.

First, referring to FIG. 6A, the semiconductor laser in this exampleuses an Sn-doped InP substrate 1 having a top face on which astripe-shaped ridge is formed. On the ridge of the Sn-doped InPsubstrate 1, a stripe-shaped multilayer structure is formed. On theSn-doped InP substrate 1 on both sides of the stripe-shaped multilayerstructure, a current blocking potion provided with a stripe-shapedgroove is formed, similar to the example shown in FIG. 1A.

The stripe-shaped multi-layer structure includes an n-InGaAsP waveguidelayer 2 having a thickness of 150 nm, an active layer 20, and a claddinglayer 13 in this order from the substrate 1. As shown in FIG. 6B, theactive layer 20 has a multiquantum well structure including InGaAsP welllayers 3 each having a thickness of 4 nm and InGaAsP (λg=1.15 μm)barrier layers 4 each having a thickness of 10 nm. The number of quantumwell layers is 7, and the cavity length is 300 μm.

The current blocking portion includes a Zn-doped p-InP first currentblocking layer (thickness: about 1 μm) 6, and an Si-doped n-InP secondcurrent blocking layer (thickness: about 1 μm) 7 in this order from thesubstrate 1. Between the p-InP first current blocking layer 6 and thesubstrate 1, an undoped InP layer 5 having a thickness of 10 nm isinterposed. On the n-InP second current blocking layer 7, a Zn-dopedp-InP third current blocking layer (thickness: about 4 μm) 8 is formed.The p-InP third current blocking layer 8 also covers the upper face ofthe stripe-shaped multi-layer structure. The relatively thick p-InPthird current blocking layer 8 may alternatively have a two-layerstructure. Preferably, the p-InP third current blocking layer 8 may beformed by a lower layer having a relatively low Zn concentration (e.g.,the Zn concentration is lower than 1×10¹⁸ cm⁻³) and an upper layerhaving a relatively high Zn concentration (e.g., the Zn concentration ishigher than 1×10¹⁸ cm⁻³).

On the p-InP third current blocking layer 8, a p-InGaAsP barrierreducing layer 9 for suppressing the Schottky barrier, a p-GaInAscontact layer 10 for forming an ohmic contact, and a p-side electrode 12made of Au/Zn are formed. On the back face of the substrate 1, an n-sideelectrode 11 made of Au/Sn is formed.

FIG. 2B shows the shape of the n-InP second current blocking layer 7 andthe shape of the stripe-shaped multilayer structure of the semiconductorlaser in this example in more detail. The side face of the stripe-shapedmulti-layer structure is a {111}In plane.

The n-InP second current blocking layer 7 has a substantially uniformthickness, but it is bent upwardly in the vicinity of the stripe-shapedmultilayer film. This is because, when the n-InP second current blockinglayer 7 is grown, the crystal growth rate is relatively increased in thevicinity of the stripe-shaped multilayer structure. As a result, asshown in FIG. 2B, the thickness of the portions of the n-InP secondcurrent blocking layer 7 in the vicinity of the stripe-shaped multilayerstructure is approximately twice as large as that of the other portions.

The angle at the end portion of the n-InP second current blocking layer7 in this example is 80 degrees or more. The relationship between theshape of the end portion of the n-InP second current blocking layer 7and the leakage current will be described with reference to FIGS. 7A to7D.

FIGS. 7A and 7B show a second current blocking layer in which the angleof the end portion thereof close to the active layer is 45 degrees orless. During the operation of the semiconductor laser, a depletion layeris formed in the second current blocking layer. The depletion layerextends from a PN junction which is formed by the second currentblocking layer and a semiconductor layer of a different conductivitytype which is in contact with the second current blocking layer. As theangle of the end portion of the second current blocking layer is madesmaller, the end portion of the depletion layer is expandedhorizontally. The depletion layer having the horizontally expanded endportion may leak a part of the driving current.

FIGS. 7C and 7D show a second current blocking layer in which the angleof the end portion in the vicinity of the active layer is about 90degrees. In such a second current blocking layer, the depletion layer isnot so expanded horizontally, even in the end portion thereof.Therefore, the end portion of the second current blocking layerrelatively prevents the driving current from leaking.

In the example shown in FIG. 6A, the possible leakage current is reduceddue to the contact of such depletion layers. When the leakage current isreduced, high light output level can be attained by a relatively smalldriving current. In addition, the linearity of the relationship betweenthe light output and the driving current is improved, so that themodulation strain of the laser can be reduced.

As the result of the evaluation of the semiconductor laser of thisexample, it was found that the semiconductor laser stably performs thelaser oscillation at a driving current of 20 mA (the oscillationthreshold value: 20 mA). The oscillation threshold value issubstantially equal to the oscillation threshold value of asemiconductor laser in which the burying layer is grown by LPE. Thelight output was increased to be 1.5 times to that of conventional case.Also, as the result of the evaluation on the reliability by anacceleration test (70° C., 150 mA, 100 hr), it was found that thevariation of the threshold value is substantially 0%.

FIG. 8 shows the relationship between the variation ratio of thethreshold current and the Zn concentration of the p-InP first currentblocking layer 6. It is seen from FIG. 8 that when the Zn concentrationof the p-InP first current blocking layer 6 becomes equal to 1×10¹⁸ cm⁻³or more, the variation ratio of threshold current increases. It isconsidered that when the Zn concentration of the p-InP layer 6 exceeds1×10¹⁸ cm⁻³, the Zn concentration in the vicinity of the side face ofthe active layer exceeds the solid solubility, and hence the thresholdvalue is caused to vary. In order to set the variation ratio ofthreshold value to be 0%, it is preferred that the Zn concentration ofthe p-InP first current blocking layer 6 is made to be 0.7×10¹⁸ cm⁻³ orless.

FIG. 9 shows the relationship among the thyristor current (constitutingan ineffective current), the Zn concentration of the p-InP first currentblocking layer 6, and the Si concentration of the n-InP layer 7. It isseen from FIG. 9 that in order to reduce the thyristor current, it ispreferred that the Si concentration of n-InP layer 7 is set to be 1×10¹⁸cm⁻³ or more. By setting the impurity concentration in this range, thethyristor current is not generated at the driving current of 300 mA orless, and the characteristics suitable for practical use can beobtained.

FIG. 10 shows the relationship among the respective dopantconcentrations of the p-InP first current blocking layer 6 and the n-InPsecond current blocking layer 7 and the occurrence of the thyristoroperation in the semiconductor shown in FIG. 6A. In FIG. 10, region aindicates a region with high reliability and region b indicates a regionwith poor reliability. Regions c and d indicate regions in which thethyristor operation does not occur. Region d indicates a region in whichthe thyristor operation may by caused. The respective dopantconcentrations of the p-InP first current blocking layer 6 and the n-InPsecond current blocking layer 7 are preferably set in the region c.

FIG. 11 shows the relationship between the Zn concentration and the holeconcentration. In the case of InP, the hole concentration is saturatedat 1×10¹⁸ cm⁻³. In the case of InGaAsP, the hole concentration issaturated at 5×10¹⁸ cm⁻³. In the case where the hole concentration issaturated, if Zn is increased, the Zn is not positioned in the lattice,but interstitially exists. In order to enhance the reliability of asemiconductor laser, it is necessary to reduce the excessive Zn, i.e.,Zn which interstitially exists. For this purpose, it is preferred thatthe Zn concentration is set in the range in which the hole concentrationis not saturated. In the case of InP, the Zn concentration is preferablyset to be 7×10¹⁷ cm⁻³ or less which is a half or less of the saturatedconcentration. In the case of InGaAsP, the Zn concentration ispreferably set to be 3×10¹⁸ cm⁻³ or less which is a half or less of thesaturated concentration.

Referring to FIGS. 12A to 12C, the method for producing a semiconductorlaser shown in FIG. 6A will be described.

First, on an Sn-doped InP substrate 1, an n-InGaAsP (λg=1.15 μm)waveguide layer 2 is grown to have a thickness of 150 nm by MOVPE. Then,a Ga₀.1 In₀.9 As₀.5 P₀.5 well layer (λg=1.37 μm) 3 having a thickness of4 nm, and a GaInAsP (λg=1.15 μm) barrier layer 4 having a thickness of10 nm are paired, and the pair of well layer 3 and barrier layer 4 isrepeatedly grown seven times. Thus, a multilayer well type active layerhaving 7 pairs is obtained. Thereafter, a p-InP cladding layer 13 havinga thickness of 400 nm is grown.

Next, a silicon nitride film is deposited, and then the silicon nitridefilm is etched into a stripe shape by dry etching, so as to obtain astripe-shaped silicon nitride film (width: 1.5 to 3 μm) 15. Thereafter,the p-InP cladding layer 13 is etched by using a chloric acid typeetchant which substantially does not etch the silicon nitride film 15but etches the p-InP cladding layer 13. Next, the wafer from the activelayer to the upper face of the substrate 1 is etched by using an aceticacid type etchant. As a result, as shown in FIG. 12B, a stripe-shapedmultilayer structure having a reversed mesa shape is obtained. Thesilicon nitride film 15 in this example is not so overhung, as comparedwith the silicon nitride film 15 shown in FIG. 3B.

Next, by MOVPE, an undoped InP layer 5 and a p-InP layer 6 and an n-InPlayer 7 are epitaxially grown. Then, the silicon nitride film 15 isremoved, and a p-InP current blocking layer 8, a p-GaInAsP barrierreducing layer 9 and a p-GaInAs contact layer 10 are grown by MOVPE in aburying manner. Thereafter, an n-side electrode 11 and a p-sideelectrode 12 are vapor deposited, so as to obtain the structure shown inFIG. 12C.

FIG. 14 is a cross-sectional view schematically showing the growthprocess of the p-InP first current blocking layer 6, the n-InP secondcurrent blocking layer 7, and the p-InP third current blocking layer 8.In this example, the side face of the ridge provided on the substrate isconstituted by a plane including a {111}In plane. The angle formed bythe side face of the ridge and the upper face of the substrate, i.e., a(001) plane is smaller than 90 degrees. In the vicinity of the ridge,the face on which the p-InP first current blocking layer 6 is grown is a(112) plane. In the case where the growth face is the (112) plane, manydangling bonds are generated and a lot of impurities are taken therein,as compared with the case where the growth face is a (114) plane. Abovethe active layer 20, a (001) plane is obtained.

Hereinafter, referring back to FIG. 4, the method for forming the p-InPfirst current blocking layer 6 and the like is described in detail. Alsoin this example, during the heating for 5 minutes, the substrate 1 isexposed to a mixed atmosphere of PH₃ and AsH₃ in the chamber of theMOVPE apparatus. Immediately after 5 minutes from the start of theheating, the growth of the undoped InP layer 5 is started. After aninterval of 10 minutes from the completion of the formation of theundoped InP layer 5, the p-InP layer 6 is formed. The purpose of this isto sufficiently raise the temperature of the substrate 1 before thegrowth of the p-InP layer 6. As a result, the dopant (Zn) in the p-InPlayer 6 in the vicinity of the active layer is prevented from beingincreased. Similarly, in this example, the crystal growth temperaturewas set to be 600° C. The current blocking layer 6 is preferably formedby the above-described method. However, in Examples 1 and 2, either oneof the methods shown in FIG. 4 can be adopted.

In order to suppress the leakage current, the thickness of the secondcurrent blocking layer needs to be larger. In this example, aninsulating film stripe with good adhesion is formed on the claddinglayer, and the width of the cap layer is set to be substantially equalto the mask width. As a result, there is no shadow effect by the mask,and the elements on the mask are supplied by diffusion. Thus, the growthrate is increased. As a result, as shown in FIGS. 7C and 7D, thethickness in the vicinity of the stripe is made larger, and the leakagecurrent due to a punch through, i.e., the contact of depletion layersgenerated in the second current blocking layer is suppressed.Accordingly, by confining the current into the active layer, the lightemission current can be increased. Herein, the growth temperature is setto be the lower limit of the growth temperatures at which goodcrystallinity can be obtained, i.e., 600° C. Thus, the excessiveelements supplied from the mask are prevented from dissipating on thecrystal by diffusion. Since the width of the cap layer and the maskwidth are equal to each other, the side face of the stripe includes astep constituted by a {111}In plane. The angle formed by this face is 90degrees or less, so that the surface of the crystal in the vicinity ofthe stripe is close to a (112) plane as shown in FIG. 2B, and hence thegrowth rate is further promoted. As shown in FIG. 2B, in the case of the{111}P plane, the growth progresses while exhibiting the (114) plane, sothat the growth rate is about 70% of the case of the (112) plane. Thisstripe shape can be obtained by etching the cladding layer with achloric acid type etchant and then by etching it with an acetic acidtype etchant.

In Examples 1 and 2, as the material of the p-type current blockinglayers 6 and 8, InP was used. Alternatively, a material from InGaAsP toInGaAs can be used instead of InP. The material from InGaAsP to InGaAshas a higher Zn solid solubility as compared with InP, so that theinfluence of Zn diffusion on the active layer 20 can be further reduced.

As the material of the first and second current blocking layers 6 and 7,if a material having a bandgap larger than that of InP such as amaterial from InGaAsP to InGaP is used, the occurrence of a thyristoroperation can easily be suppressed. Alternatively, as the material ofthe third current blocking layer 8, if a material having a bandgaplarger than that of InP such as a material from InGaAsP to InGaP isused, the occurrence of a thyristor operation can easily be suppressed,and the leakage current can be further reduced.

In Examples 1 and 2, crystals of InP type compound semiconductor areused. Alternatively, crystals of other types of semiconductor materialssuch as GaAs, ZnSe, InAlAs, AlGaAs, and GaInAlAsP may also be used.

The present invention can be applied to a laser with high additionalvalue such as a DFB laser and a DBR laser in addition to the DH laser.The structure of the burying layers of PBH type was employed in Examples1 and 2. It is appreciated that any other structure can also be used.

In addition, in Examples 1 and 2, the active layer 20 of quantum wellstructure is employed. It is appreciated that a strained quantum wellstructure can be adopted.

The waveguide layer is formed of a simple InGaAsP layer. Alternatively,the waveguide layer may be formed of an InGaAsP layer having a gratedcomposition. The crystal growth method is not limited to the MOVPE.Alternatively, other methods such as gas source MBE, MOMBE, hydride VPEcan also be used.

The dopant is not limited to Zn or Si. Any other type of dopant can beused. As the insulating film, a silicon nitride film is used.Alternatively, the insulating film can be made of a material with goodselectivity, such as an oxide film. As the substrate, an n-typesubstrate is used. Alternatively, a p-type substrate can be used.

(EXAMPLE 3)

FIG. 15 shows the cross section of another example of a semiconductorlaser according to the invention. The semiconductor laser includes anSn-doped n-InP substrate 31, and a stripe-shaped multi-layer structureformed on the InP substrate 31. The stripe-shaped multi-layer structureincludes strained quantum well type active layer 35 having a gradeddoped structure. The active layer 35 includes a strained well layer (6nm) 33 having a compressive strain of 1%, and an InGaAsP barrier layer(thickness: 15 nm) 34 having a bandgap wavelength of 1.31 μm. The numberof wells is five. The barrier layer 34 includes an undoped InGaAsP layer34a, a Zn-doped InGaAsP layer (Zn concentration: and an 5×10¹⁸ cm⁻³)34b, and an undoped InGaAsP layer 34c.

In the stripe-shaped multi-layer structure, the strained quantum welltype active layer 35 of the graded doped structure is sandwiched betweenan n-type InGaAsP waveguide layer (thickness: 30 nm) 32 and a p-typeInGaAsP waveguide layer (thickness: 100 nm) 36. The p-type InGaAsPwaveguide layer 36 is doped with Zn of 5×10¹⁷ cm⁻³.

On both sides of the stripe-shaped multi-layer structure, a currentblocking portion is provided for confining the current in thestripe-shaped multi-layer structure. The current blocking portionincludes a p-type InP layer 37a and an n-type InP layer 37b, and hence aPN junction is formed therein. When the semiconductor laser is driven, areversed bias is applied to the PN junction.

A diffusion suppressing layer (thickness: 200 nm, Zn concentration:5×10¹⁷ cm⁻³) 38 is formed so as to cover both the stripe-shapedmulti-layer structure and the current blocking portion. On the diffusionsuppressing layer 38, a p-type InP cladding layer (thickness: 4 μm, Znconcentration: 5×10¹⁷ cm⁻³) 39, a p-type InGaAs cap layer (thickness:200 nm, Zn concentration: 5×10¹⁸ cm⁻³) 40, and a p-side electrode 41 areformed in this order. On the back face of the substrate 31, an n-sideelectrode 42 is provided.

When the p-type InP cladding layer 39 interstitially contains thedopant, the p-type InP cladding layer 39 functions as a source of thedopant. In this example, Zn is used as the p-type dopant, so that theinvention is described as to the Zn diffusion. If any other dopant suchas Be, Mg, Cd, Se, S, Te, or C is used, the same description can bemade.

The solid solubility of Zn in the InP layer depends on the growthconditions of the InP layer (the temperature, the total gas flow rate,and the like), but the solid solubility of Zn in the InP layer is about1×10¹⁸ cm⁻³. When the Zn concentration of the p-type InP cladding layer39 is set to be 5×10¹⁷ cm⁻³ or less, the concentration of Zn whichinterstitially exists in the cladding layer 39 is lowered so as to benegligible. Therefore, the Zn diffusion from the p-type InP claddinglayer 39 to the active layer 35 is significantly suppressed.

In this example, not only the Zn concentration of the p-type InPcladding layer 39 is lowered, but also two types of InGaAsP layers,i.e., the p-type InGaAsP waveguide layer 36 and the p-type InGaAsPdiffusion suppressing layer 38 are provided between the p-type InPcladding layer 39 and the active layer 35. InGaAsP functions forsufficiently solid-solving even when Zn interstitially existing in thep-type InP cladding layer 39 positioned above is diffused, so that theZn is substantially prevented from being diffused below. Therefore, thegraded doped structure of the strained quantum well active layer 35 isnot eventually destroyed but maintained.

In order to reduce the resistance, the p-type InGaAsP waveguide layer 36and the p-type InGaAsP diffusion suppressing layer 38 are doped with Znof 5×10¹⁷ cm⁻³. However, the solid solubility of InGaAsP is much higherthan 1×10¹⁸ cm⁻³, so that the doped Zn interstitially exists, andsubstantially does not contribute to the diffusion.

If the p-type InGaAsP diffusion suppressing layer 38 is not provided butonly the p-type InGaAsP waveguide layer 36 is provided between thep-type cladding layer 39 and the active layer 35, it is necessary tomake the thickness of the p-type InGaAsP waveguide layer 36 sufficientlylarge. However, as the thickness of the p-type InGaAsP waveguide layer36 is made larger, more leakage current flows from the p-type InPcladding layer 39 to the p-type InP layer 37a via the side portion ofthe p-type InGaAsP waveguide layer 36. According to this invention, anInGaAsP layer having a necessary thickness can be provided between thep-type InP cladding layer 39 and the active layer 35 while the thicknessof the p-type InGaAsP waveguide layer 36 is maintained to be a thicknessby which the leakage current is not greatly increased, so that theabove-mentioned problems never occur.

In order to make the light distribution of the semiconductor laseruniform, it is preferred that the p-type InP cladding layer 39 has asufficiently large thickness (e.g., equal to 4 microns or more). Inorder to make the p-type InP cladding layer 39 thicker, it is necessaryto perform the crystal growth for a long time at the growth temperature.If the diffusion suppressing layer 38 is not provided during the growthof the thick p-type InP cladding layer 39, there arises a problem ofdopant diffusion from the p-type cladding layer 39 to the active layer35. However, according to the invention, the problem does not occur dueto the provision of the diffusion suppressing layer 38. Accordingly, thep-type InP cladding layer 39 can be grown so as to have a desiredthickness, and a semiconductor laser having superior light distributioncan be obtained.

The band gap of the diffusion suppressing layer (InGaAsP) 38 used inthis example is smaller than the band gap of InP, so that the injectedcurrent hardly flows into the p-type InP layer 37a which constitutes thecurrent blocking portion. As a result, the leakage current which doesnot contribute to the light emission can be advantageously reduced.Therefore, the linearity of the light output to injected currentcharacteristics is improved, so that the modulation strain can bereduced as compared with analog modulation.

Hereinafter, referring to FIGS. 16A to 16D, the reduction of leakagecurrent by the diffusion suppressing layer 38 will be described.

FIG. 16D is a schematic diagram of a cross section corresponding to thecross-sectional view of FIG. 15, and shows three kinds of current pathsA, B, and C. The current path C shows a path of an effective currentwhich contributes to the laser oscillation. The current paths A and Bshow paths of ineffective currents which do not contribute to the laseroscillation. In FIG. 16D, a5 to a5, b1 to b5, and c1 to c5 are regionsof semiconductor through which the current flows for the respectivecurrent paths.

As shown in FIG. 16A, the band gap of the diffusion suppressing layer 38is smaller than the band gap of the n-type InP layer 37b, so that thereexists an energy gap between the region a4 and the region a3. Therefore,the current cannot flow from the region a4 to the region a3, and acurrent A does not occur until the thyristor state is established. Holesinjected from the region a5 to the region a4 are injected into theregion c3.

As shown in FIG. 16B, the band gap of the diffusion suppressing layer 38is smaller than the band gap of the p-type InP layer 37a, so that thereexists an energy gap between the region b4 and the region b2. Therefore,the current hardly flows from the region b4 to the region b2, so thatthe current B is extremely small.

As shown in FIG. 16C, holes from the regions a5 and b5 to the regions a4and b4, respectively, flow into the region c3.

As described above, according to this example, the current introducedfrom the p-side electrode 41 is efficiently confined in thestripe-shaped multi-layer structure by the function of the currentblocking portion 37 and the diffusion suppressing layer 38. The currentconfined in the stripe-shaped multi-layer structure is injected into theactive layer 35 and contributes to the laser oscillation. In order toobtain light having a wavelength of 1.31 μm, the thickness of thestrained well layer 33 of the active layer 35 is set to be a requiredvalue depending on the composition of the semiconductor material usedfor the strained well layer 33. In this example, the strained well layer33 is formed of Ga₀.1 In₀.9 As₀.5 P₀.5, and the thickness thereof is setto be 6 nm. By calculation, light having a wavelength of 1.41 μm isobtained from the bulk semiconductor material of Ga₀.1 In₀.9 As₀.5 P₀.5.In this example (the cavity length is 300 μm), it is confirmed thatlight having a wavelength of 1.30 μm is obtained. This energy shift (70meV) is caused by the quantum size effect. The oscillation thresholdvalue was 15 mA, the reducing oscillation frequency was 2.2GHz/mA^(1/2), and the transmission strain IM2 was less than -65 dBc(modulation factor 20%). This is because the leakage current is reduced,and the graded doped structure of the strained quantum well type activelayer 35 is maintained.

The diffusion suppressing layer 38 of this example has a one-layerstructure, but alternatively may have a structure of two or more layers.In such a case, the property that the energy band gap thereof is lowerthan that of the current blocking portion and the property that theimpurity solid solubility thereof is higher than that of the p-typecladding layer can be realized by different layers.

Next, referring to FIGS. 17A to 17D, the method for producing thesemiconductor laser shown in FIG. 15 will be described.

First, on an Sn-doped n-type InP substrate 31, an n-type InGaAsPwaveguide layer (λg=1.31 μm) 32 is grown by MOVPE. Next, a Ga₀.3 In₀.7As₀.5 P₀.5 strained well layer 33 having a compression strain of 1% andan InGaAsP barrier layer (λg=1.31 μm) 34 are alternately grown 5 times.Thus, a quantum well type active layer 35 having a graded dopedstructure including five quantum well layers is formed. Thereafter, ap-type InGaAsP waveguide layer (λg=1.31 μm) 36 is further grown. As aresult, a structure shown in FIG. 17A is obtained.

Next, by using a silicon nitride film patterned into a stripe shape asan etching mask, the p-type InGaAsP waveguide layer 36, the graded dopedquantum well type active layer 35, and the n-type InGaAsP waveguidelayer 32 are selectively etched into a mesa shape. Thus, a stripe-shapedmultilayer structure including the active layer 35 is obtained as shownin FIG. 17B.

Then, a p-type InP layer 37a and an n-type InP layer 37b constituting acurrent blocking portion are selectively grown on both sides of thestripe-shaped multilayer structure by MOVPE. After the silicon nitridefilm is removed, a diffusion suppressing layer 38, a p-type InP claddinglayer 39, and a p-type InGaAs cap layer 40 are grown by MOVPE. Thus, astructure shown in FIG. 17C is obtained.

Finally, by vapor deposition, a p-side electrode 41 and an n-sideelectrode 42 are formed.

In the crystal growth step by MOVPE, the total flow rate through thegrowth chamber was 5 L/min, and the growth temperature was 640° C.

The growth of the diffusion suppressing layer 38 on the current blockingportion is achieved by supplying AsH₃ and PH₃ into the growth chamber at640° C. Until the temperature reaches 640° C., AsH₃ and PH₃ which willflow for growing the diffusion suppressing layer 38 is supplied into thegrowth chamber, so that the defects at the interface between thewaveguide layer 36 and the diffusion suppressing layer 38 are reduced.

As a well layer, a strained well layer having a compression strain of 1%was used. However, the graded doped effect does not depend on themagnitude of the strain, so that the magnitude of strain may be set toanother value (e.g., a value causing tension). As the construction ofthe semiconductor laser, instead of the DH structure, a DFB structureand a DBR structure can also be adopted. In addition, a constructionother than PBH can be doped for the current blocking portion.

The invention can be applied to another electric device (HEMT, HFET, andHBT), a waveguide device, a photodetective device, and the like, inaddition to the semiconductor laser, insofar as the device has thegraded doped quantum well structure. Especially, when the invention isapplied to the semiconductor lasers shown in FIGS. 1A and 6A, thereliability is further enhanced and the leakage current is furtherreduced.

In the first current blocking layer in this invention, the impurityconcentration is relatively lowered in the region thereof closer to thestripe-shaped multilayer structure including the active layer, so thatthe impurity has no adverse influence on the active layer. Therefore,the reliability of the semiconductor laser is enhanced. In addition, theconcentration of the impurities introduced into regions of the firstcurrent blocking layer away from the active layer can be made high.Thus, the resultant current blocking portion has a structure in whichthe thyristor operation is difficult to occur. As a result, the leakagecurrent is reduced.

In addition, by increasing the angle at the end portion of the secondcurrent blocking layer, the punch through hardly occurs within the endportion.

Moreover, according to the invention, due to the function of thediffusion suppressing layer, the graded doped structure of the quantumwell type active layer is not eliminated in the production process, andcan attain the inherent effects thereof. The diffusion suppressing layercovers both the stripe-shaped multilayer structure and the currentblocking portion, and the diffusion suppressing layer has a bandgapwhich is smaller than that of the current blocking portion, so that anineffective current flowing into the current blocking portion can bereduced. In the stripe-shaped multilayer structure, a waveguide layerformed of a material having the same properties as those of thediffusion suppressing layer is provided, so that the graded dopedstructure can be more stably maintained.

As described above, the current confinement efficiency is enhanced whilethe graded doped structure can actually attain the effects thereof, sothat the ineffective current can be reduced. As a result, the linearityof the relationship between the injected current and the light output isimproved and it is possible to provide a semiconductor laser having alow transmission strain characteristic.

Various other modifications will be apparent to and can be readily madeby those skilled in the art without departing from the scope and spiritof this invention. Accordingly, it is not intended that the scope of theclaims appended hereto be limited to the description as set forthherein, but rather that the claims be broadly construed.

What is claimed is:
 1. A method for producing a semiconductor lasercomprising: a semiconductor substrate of a first conductivity type; astripe-shaped multilayer structure, formed on the semiconductorsubstrate, the stripe-shaped multilayer structure including an activelayer; and a current blocking portion formed on the semiconductorsubstrate on both sides of the stripe-shaped multilayer structure, themethod comprising the steps of:depositing a plurality of semiconductorlayers including the active layer on the semiconductor substrate;forming a stripe-shaped mask layer on the semiconductor substrate;selectively etching the semiconductor layer using an etchant to form thestripe-shaped multilayer structure, the etchant substantially notetching the mask layer; growing a first current blocking layer of asecond conductivity type on the semiconductor substrate; and growing asecond current blocking layer of the first conductivity type on thefirst current blocking layer, one of end portions of the second currentblocking layer closer to the stripe-shaped multilayer structure havingan apex angle of 60 degrees or more.
 2. A production method according toclaim 1, wherein the first and the second current blocking layers areepitaxially grown at a growth temperature of 600° C. or more by organicmetal vapor phase epitaxy.
 3. A production method according to claim 1,further comprising a step of epitaxially growing an undopedsemiconductor layer, prior to the formation of the first and secondcurrent blocking layer.